JPH02133485U - - Google Patents

Info

Publication number
JPH02133485U
JPH02133485U JP9765588U JP9765588U JPH02133485U JP H02133485 U JPH02133485 U JP H02133485U JP 9765588 U JP9765588 U JP 9765588U JP 9765588 U JP9765588 U JP 9765588U JP H02133485 U JPH02133485 U JP H02133485U
Authority
JP
Japan
Prior art keywords
cleaning
removal port
gutter
door
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9765588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429898Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9765588U priority Critical patent/JPH0429898Y2/ja
Publication of JPH02133485U publication Critical patent/JPH02133485U/ja
Application granted granted Critical
Publication of JPH0429898Y2 publication Critical patent/JPH0429898Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP9765588U 1988-07-22 1988-07-22 Expired JPH0429898Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9765588U JPH0429898Y2 (en]) 1988-07-22 1988-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9765588U JPH0429898Y2 (en]) 1988-07-22 1988-07-22

Publications (2)

Publication Number Publication Date
JPH02133485U true JPH02133485U (en]) 1990-11-06
JPH0429898Y2 JPH0429898Y2 (en]) 1992-07-20

Family

ID=31646790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9765588U Expired JPH0429898Y2 (en]) 1988-07-22 1988-07-22

Country Status (1)

Country Link
JP (1) JPH0429898Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624780U (ja) * 1992-09-07 1994-04-05 大日本スクリーン製造株式会社 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624780U (ja) * 1992-09-07 1994-04-05 大日本スクリーン製造株式会社 基板処理装置

Also Published As

Publication number Publication date
JPH0429898Y2 (en]) 1992-07-20

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