JPH02133485U - - Google Patents
Info
- Publication number
- JPH02133485U JPH02133485U JP9765588U JP9765588U JPH02133485U JP H02133485 U JPH02133485 U JP H02133485U JP 9765588 U JP9765588 U JP 9765588U JP 9765588 U JP9765588 U JP 9765588U JP H02133485 U JPH02133485 U JP H02133485U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- removal port
- gutter
- door
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005406 washing Methods 0.000 description 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9765588U JPH0429898Y2 (en]) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9765588U JPH0429898Y2 (en]) | 1988-07-22 | 1988-07-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02133485U true JPH02133485U (en]) | 1990-11-06 |
JPH0429898Y2 JPH0429898Y2 (en]) | 1992-07-20 |
Family
ID=31646790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9765588U Expired JPH0429898Y2 (en]) | 1988-07-22 | 1988-07-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0429898Y2 (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0624780U (ja) * | 1992-09-07 | 1994-04-05 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
1988
- 1988-07-22 JP JP9765588U patent/JPH0429898Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0624780U (ja) * | 1992-09-07 | 1994-04-05 | 大日本スクリーン製造株式会社 | 基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0429898Y2 (en]) | 1992-07-20 |